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Reactive-ion etching
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31	PDF Document Add to Reading List Source URL: nanomelbourne.com Language: English - Date: 2012-08-28 20:43:03 Structural system Melbourne Centre for Nanofabrication Technology Deep reactive-ion etching Nanotechnology Materials science Cantilever
32	Chemical Name Index XI Library of Digital XPS Spectra Copyright © January 1997 XPS International Add to Reading List Source URL: www.xpsdata.com Language: English - Date: 2008-05-21 17:29:42 Technology Etching Deep reactive-ion etching Microtechnology Semiconductor device fabrication Materials science
33	PDF Document Add to Reading List Source URL: www.hisglassworks.com Language: English - Date: 2014-10-13 15:22:07 Semiconductor device fabrication Etching Technology Deep reactive-ion etching Glass etching Glass Visual arts Materials science Microtechnology
34	3D IC WORKING GROUP MEETING OCTOBER 22, 2014 3D IC Working Group Meeting Agenda Time Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2014-10-23 00:12:03 Three-dimensional integrated circuit Technology Deep reactive-ion etching Semiconductor device fabrication Microtechnology Materials science
35	High Volume Assembly & Test Solutions To Meet The Rapidly Growing MEMS Market Russell Shumway Director- MEMS & Sensor Products Office: Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2014-01-22 10:45:23 Semiconductor device fabrication Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Wafer bonding Flip chip Deep reactive-ion etching Amkor Technology Materials science Technology Microtechnology
36	MEMS Working Group March 26, 2015 Agenda Time Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2015-03-27 15:12:53 Technology Electromagnetism Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Deep reactive-ion etching Microelectromechanical system oscillator Nasiri-Fabrication Microtechnology Materials science Semiconductor device fabrication
37	A FULLY DRY SELF-ASSEMBLY PROCESS WITH PROPER IN-PLANE ORIENTATION Sangjun Park and Karl F. Bö Böhringer Department of Electrical Engineering University of Washington, Seattle, WA[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2008-01-10 14:48:22 Technology Deep reactive-ion etching Etching Microfabrication Wafer Isotropic etching Passivation Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
38	SELF-ASSEMBLY OF MICRO PUMPS WITH HIGH UNIFORMITY IN PERFORMANCE Jiandong Fang, Kerwin Wang, Karl F. Böhringer Department of Electrical Engineering University of Washington Seattle, WA[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2004-03-16 02:48:00 Semiconductor device fabrication Physics Transducers Nanotechnology Mechanical engineering Microelectromechanical systems Deep reactive-ion etching Piezoelectricity Pump Materials science Chemistry Microtechnology
39	HIGH-ASPECT RATIO SUBMICROMETER NEEDLES FOR INTRACELLULAR APPLICATIONS C. G. J. Schabmueller, Y. Hanein, G. Holman, K. F. Böhringer University of Washington, Department of Electrical Engineering, Seattle, Washington 981 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2002-06-13 21:08:00 Technology Chemistry Neurophysiology Deep reactive-ion etching Etching Silicon Microelectromechanical systems Black silicon 100 micrometres Microtechnology Materials science Semiconductor device fabrication
40	TIME-MULTIPLEXED-PLASMA-ETCHING OF HIGH NUMERICAL APERTURE PARABOLOIDAL MICROMIRROR ARRAYS Kerwin Wang, Karl F. Böhringer Electrical Engineering Department, University of Washington Seattle, WA[removed]Phone[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-09 02:25:14 Technology Micro-Opto-Electro-Mechanical Systems Etching Mirror Deep reactive-ion etching Plasma Microlens Dry etching Reactive-ion etching Microtechnology Materials science Semiconductor device fabrication

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